Numerical simulation of flow field and thin film deposition in PECVD reactor

Faculty of Engineering

Assiut University

Numerical simulation of flow field and thin film deposition in PECVD reactor

Research Authors
Emad Barakat and Joo-Pyo Hong and Seungkyung Park
Research Member
Emad Gamal Barakat Hussein
Research Year
2023
Research Publisher
Proceedings of the 9th International Conference on Manufacturing, Machine Design and Tribology (ICMDT 2023)
Research Rank
International Confrences