Research Abstract
Deep investigations were performed for further understanding of the nanostructure of sputtered WO3 ˆlms. The as-deposited
ˆlms consisted of ˆne crystallites of several nm. As the pressure increased, the ˆlm density decreased and the surface area increased
owing to open pores between grains. When ˆlms were annealed at 400°C or above, they were well crystallized to form
monoclinic and randomly-shaped grains. Upon this crystallization, the ˆlm shrank and its density increased slightly, while the
relative surface area substantially decreased.
Research Department
Research Journal
Journal of the Vacuum Society of Japan
Research Member
Research Publisher
Journal of the Vacuum Society of Japan (letter)
Research Rank
1
Research Vol
Vol. 53 - No. 3
Research Website
https://www.jstage.jst.go.jp/article/jvsj2/53/3/53_3_210/_article
Research Year
2010
Research Pages
211-213