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Electrode configurations for layered-plate piezoelectric micro-actuators

Research Authors
Cuong H. Nguyen, Mahmoud A. Farghaly, Muhammad N. Akram, Ulrik Hanke, Einar Halvorsen
Research Department
Research Year
2017
Research Journal
Microelectronic Engineering
Research Publisher
Elsevier
Research Vol
174
Research Rank
1
Research_Pages
59-63
Research Website
https://www.sciencedirect.com/science/article/pii/S0167931717300321
Research Abstract

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